TY  - JOUR
A1  - Murphy, C F
A1  - Kenig, G A
A1  - Allen, D T
A1  - Laurent, J P
A1  - Dyer, D E
T1  - Development of parametric material, energy, and emission inventories for wafer fabrication in the semiconductor industry.
Y1  - 2003//
N1  - R828208
JF  - ENVIRONMENTAL SCIENCE & TECHNOLOGY
J1  - ENVIRON SCI TECHNOL
J2  - ENVIRONMENTAL SCIENCE & TECHNOLOGY
J3  - Enviornmenal Research
VL  - 37
IS  - 23
SP  - 5373
EP  - 5382
ER  -